it is shown in mechanism analysis that 1 / f noise originating from border traps is ~ sensitive to both of the oxide charges and interface traps induced by esd and hci and the similarity coefficient can express the local characterization more thoroughly, while the changes of electrical parameters usually lie on one of the defects 機(jī)理分析表明,起源于邊界陷阱的1/f噪聲對于靜電和熱載流子誘發(fā)的氧化層電荷和界面陷阱兩類缺陷都同時敏感,而相似系數(shù)更能反映1/f信號的局域特性,但電參數(shù)的變化通常主要取決于其中一類缺陷。